Laboratorie-, optisk- og presisjonsutstyr
Danmarks Tekniske Universitet (DTU) needs a high-end Scanning Electron Microscope (SEM) for a university facility in Københavns omegn, with a contract duration of 1 year. The SEM must have a field emission source, state-of-the-art lateral image resolution of 0.8 nm or better at 15 kV and 0.9 nm or better at 1 kV, and be capable of handling wafers up to 200 mm in diameter, including non-conductive samples like silicon, fused silica, and quartz without coatings. The purpose is to address a bottleneck in high-end characterization in the cleanroom and meet the requirements of DTU’s commercial customers. The award criteria are Price (50%), Functionality and quality (10%), Demonstrated performance (25%), and Delivery (15%). Suppliers must provide at least 3 relevant references, not more than 5 years old, demonstrating previous delivery, installation, and servicing of a substantially equivalent SEM.